![]() Original Assignee Fujitsu Ltd Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) Beilin Wen-chou Vincent Wang Masaaki Inao Current Assignee (The listed assignees may be inaccurate. ( en Inventor Tetsuzo Yoshimura Yasuhito Takahashi James Roman Solomon I. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Expired - Fee Related, expires Application number US09/767,582 Other versions US20020097962A1 Google Patents Single and multilayer waveguides and fabrication processÄownload PDF Info Publication number US6785447B2 US6785447B2 US09/767,582 US76758201A US6785447B2 US 6785447 B2 US6785447 B2 US 6785447B2 US 76758201 A US76758201 A US 76758201A US 6785447 B2 US6785447 B2 US 6785447B2 Authority US United States Prior art keywords layer optical waveguide cladding substrate Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. ![]() Google Patents US6785447B2 - Single and multilayer waveguides and fabrication process ![]() US6785447B2 - Single and multilayer waveguides and fabrication process ![]()
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